Synthesis and Fragmentation of 2,2-Diazido-1,3,2-dioxasila-5-cycloheptenes. The Chemical Vapor Deposition of SiO<sub>2</sub>
作者:Rainer Herges、Felix Starck
DOI:10.1021/ja9615886
日期:1996.1.1
fragmentation reaction the corresponding diazido silanes were chosen as silylene precursors. Two different strategies for the synthesis of 4,4‘,7,7‘-tetramethyl-2,2-diazido-1.3.2-dioxasila-5-cycloheptene are presented. Unlike the 4,7-dimethyl- and the unsubstituted system the tetramethyl derivative is stable toward polymerization. It decomposes under flash vacuum pyrolysis conditions at 650 °C and can be used