申请人:Foster Patrick
公开号:US20050042542A1
公开(公告)日:2005-02-24
Polymers and co-polymers having monomeric units formed by the polymerization of monomers of the Structure I
where R
1
is a moiety containing an ethylenically unsaturated polymerizable group, R
2
is a C
1
-C
3
alkylene group, and R
3
is a C
1-10
linear or cyclic alkyl group, a C
6-10
aromatic or substituted aromatic group, a C
1-8
alkoxy methyl, or a C
1-8
alkoxy ethyl group, are useful as binder resins for photosensitive compositions, and processes for photolithography in the production of semiconductor devices and materials.
具有由结构I单体聚合形成的单体单元的高分子和共聚物,其中R1是含有乙烯基不饱和可聚合基团的基团,R2是C1-C3烷基基团,R3是C1-10线性或环烷基团,C6-10芳香或取代芳香基团,C1-8烷氧甲基或C1-8烷氧乙基基团,可用作感光组合物的粘合剂树脂,以及在半导体器件和材料的制造中用于光刻工艺的过程。