[EN] CARBOSILANE SUBSTITUTED AMINE PRECURSORS FOR DEPOSITION OF SI-CONTAINING FILMS AND METHODS THEREOF [FR] PRÉCURSEURS D'AMINE À SUBSTITUTION CARBOSILANE POUR LE DÉPÔT DE FILMS CONTENANT SI ET PROCÉDÉS ASSOCIÉS
[EN] ALKYLAMINO-SUBSTITUTED CARBOSILANE PRECURSORS<br/>[FR] PRÉCURSEURS DE CARBOSILANE À SUBSTITUTION ALKYLAMINO
申请人:AIR LIQUIDE
公开号:WO2016007708A1
公开(公告)日:2016-01-14
Disclosed are Si-containing film forming compositions comprising alkylamino-substituted carbosilane precursors, methods of synthesizing the same, and their use for vapor deposition processes.