申请人:AIR PRODUCTS AND CHEMICALS, INC.
公开号:US20140158580A1
公开(公告)日:2014-06-12
Described herein are alkoxysilylamine precursors having the following Formulae A and B:
wherein R
1
and R
4
are independently selected from a linear or branched C
1
to C
10
alkyl group, a C
3
to C
12
alkenyl group, a C
3
to C
12
alkynyl group, a C
4
to C
10
cyclic alkyl group, and a C
6
to C
10
aryl group and wherein R
2
, R
3
, R
4
, R
5
, and R
6
are independently selected from the group consisting of hydrogen, a linear or branched C
1
to C
10
alkyl group, a C
2
to C
12
alkenyl group, a C
2
to C
12
alkynyl group, a C
4
to C
10
cyclic alkyl, a C
6
to C
10
aryl group, and a linear or branched C
1
to C
10
alkoxy group. Also described herein are deposition processes using at least one precursor have Formulae A and/or B described herein.
本文描述了具有以下A和B公式的烷氧基硅胺前体:
其中R1和R4分别选择自线性或支链C1至C10烷基,C3至C12烯基,C3至C12炔基,C4至C10环烷基和C6至C10芳基,而R2、R3、R4、R5和R6分别选择自氢、线性或支链C1至C10烷基,C2至C12烯基,C2至C12炔基,C4至C10环烷基,C6至C10芳基和线性或支链C1至C10烷氧基的群。本文还描述了使用至少一种具有本文所述A和/或B公式的前体的沉积过程。