A semiconductor device comprising a semiconductor substrate with a plurality of photo-diodes arranged in the semiconductor substrate with interconnect layers defining apertures at the photo-diodes and a first polymer which fills the gaps such as to cover the photo-diode. Further, layers of color filters are arranged on top the gap filling polymer layer opposite to the photo-diodes and a second polymer arranged on the interconnect layers covers and planarizes and passivates the color filter layers. On top of the planarizing polymer there is a plurality of micro-lenses opposite to the color filters, and a third polymer layer is deposited on the micro-lenses for passivating the micro-lenses. According to the invention the polymer materials are comprised of a siloxane polymer which gives thermally and mechanically stable, high index of refraction, dense dielectric films exhibiting high-cracking threshold, low pore volume and pore size.
一种半导体器件,包括半导体基板,其中在半导体基板上排列有多个光电二极管,互连层在光电二极管处定义孔隙,并且第一聚合物填充间隙,以覆盖光电二极管。此外,颜色滤光片层排列在填充间隙的聚合物层的顶部,与光电二极管相对,第二聚合物排列在互连层上,覆盖、平整化和无源化颜色滤光片层。在平整化聚合物的顶部,有多个微透镜与颜色滤光片相对,第三聚合物层沉积在微透镜上,以无源化微透镜。根据本发明,聚合物材料由
硅氧烷聚合物组成,可提供具有高折射率、密度介电膜、高热稳定性和机械稳定性的膜,具有高裂纹阈值、低孔隙体积和孔径。