A method for safely and efficiently producing high-purity dialkylaminosilane. Dialkylamine is fed simultaneously during feeding chlorosilane in the presence of metal to cause reaction. For example, chlorosilane and dialkylamine are fed, and then only dialkylamine is fed to cause reaction, whereby dialkylaminosilane is produced.
一种安全高效地生产高纯度二烷基
氨基
硅烷的方法。在
金属存在的情况下,同时加入二烷基胺和
氯硅烷以引发反应。例如,先加入
氯硅烷和二烷基胺,然后只加入二烷基胺以引发反应,从而产生二烷基
氨基
硅烷。