A directed self-assembling composition for pattern formation includes a block copolymer. The block copolymer includes a polystyrene block having a styrene unit, and a polyalkyl (meth)acrylate block having an alkyl (meth)acrylate unit. The block copolymer has a group that is bound to at least one end of a main chain of the block copolymer and that includes a hetero atom.
一种用于图案形成的定向自组装组合物包括嵌段共聚物。嵌段聚合物包括具有
苯乙烯单元的聚
苯乙烯嵌段和具有烷基(甲基)
丙烯酸酯单元的聚烷基(甲基)
丙烯酸酯嵌段。嵌段聚合物具有与嵌段共聚物主链至少一端结合的基团,该基团包括杂原子。