申请人:JOO Hyun Sang
公开号:US20120172606A1
公开(公告)日:2012-07-05
A sulfonium compound represented by formula (1), a photo-acid generator, and a method for producing a sulfonium compound are provided:
wherein X represents an electron-donating group; R
1
and R
2
each represent an alkyl group, a cycloalkyl group, or the like; R
3
and R
4
each represent an arylene group or a heteroarylene group; R
5
and R
6
each represent an alkyl group, a cycloalkyl group, or the like; and A
−
and B
−
are anions that are different from each other. The sulfonium compound, when used as a photo-acid generator, can produce a uniform and excellent resist pattern.
提供一个由公式(1)表示的磺onium化合物,一种光酸发生器,以及一种生产磺onium化合物的方法:其中X代表一个给电子基团;R1和R2各自代表一个烷基、环烷基或类似基团;R3和R4各自代表一个芳香族基或杂芳香族基团;R5和R6各自代表一个烷基、环烷基或类似基团;A−和B−是彼此不同的阴离子。当磺onium化合物用作光酸发生器时,能够产生均匀且优良的抗蚀剂图案。