Provided are a novel amino-silyl amine compound, a method for preparing the same, and a silicon-containing thin-film using the same, wherein the amino-silyl amine compound has thermal stability and high volatility and is maintained in a liquid state at room temperature and under a pressure where handling is easy to thereby form a silicon-containing thin-film having high purity and excellent physical and electrical properties by various deposition methods.
本发明提供了一种新型的
氨基
硅烷胺化合物、其制备方法和使用该化合物的含
硅薄膜。其中,该
氨基
硅烷胺化合物具有热稳定性和高挥发性,在室温和易于操作的压力下保持液态,从而通过各种沉积方法形成高纯度和优异物理电学性能的含
硅薄膜。