申请人:Tokyo Ohka Kogyo Co., Ltd.
公开号:EP3199520A1
公开(公告)日:2017-08-02
Provided are a novel sulfonium salt having high sensitivity with respect to active energy rays, a photoacid generator comprising the sulfonium salt, and a photosensitive composition containing the photoacid generator. The sulfonium salt is represented by formula (a1). In the formula, R1 and R2 each independently represent the group that is represented by formula (a2) or an alkyl group that may be substituted by a halogen atom, R1 and R2 are bonded to each other and may form a ring with the sulfur atom within the formula, R3 is the group represented by formula (a3) or the group represented by formula (a4), A1 represents S or the like, X-represents a monovalent anion, and R1 and R2 are not both an alkyl group which may be substituted with a halogen atom. In formulas (a2) to (a4), the ring Z1 represents an aromatic hydrocarbon ring, R4, R6, R9, and R10 each represents a specific monovalent group, R5, R7, and R8 each represents a specific divalent group, A2 and A3 each represents S or the like, ml represents an integer of 0 or more, and n1 and n2 each represent 0 or more.
本文提供了一种对活性能量射线具有高灵敏度的新型锍盐、一种包含该锍盐的光酸发生器以及一种含有该光酸发生器的光敏组合物。锍盐用式(a1)表示。在该式中,R1 和 R2 各自独立地代表由式(a2)表示的基团或可被卤素原子取代的烷基,R1 和 R2 相互键合并可与式中的硫原子形成环,R3 是由式(a3)表示的基团或由式(a4)表示的基团,A1 代表 S 或类似物,X 代表一价阴离子,且 R1 和 R2 并非都是可被卤素原子取代的烷基。在式 (a2) 至 (a4) 中,环 Z1 代表芳香烃环,R4、R6、R9 和 R10 各代表特定的一价基团,R5、R7 和 R8 各代表特定的二价基团,A2 和 A3 各代表 S 或类似物,ml 代表 0 或以上的整数,n1 和 n2 各代表 0 或以上。