perpendicular to the surface. The heavier Zr(IV) species do not lead to significant ZrE(2) deposition. On the other hand, LPCVD of [SnCl(4)o-C(6)H(4)(CH(2)SMe)(2)}] leads to deposition of SnS(2) at lower temperatures and SnS at higher temperatures, while [SnCl(4)o-C(6)H(4)(CH(2)SeMe)(2)}] gives rather uneven coatings of SnSe(2). The Et(2)Se derivative, [SnCl(4)(Et(2)Se)(2)] leads to uniform deposition
TiCl(4)或ZrI(4)与柔软的中性oC(6)H(4)(CH(2)
EMe)(2)(E = S或Se)在无
水CH(2)Cl(2)中的反应)(或
甲苯)产生扭曲的八面体螯合物[MX(4)oC(6)H(4)(CH(2)
EMe)(2)}]。使用Et(2)Se得到[MX(4)(Et(2)Se)(2)](M = Zr,X = Cl或I; M = Hf,X = I)。Sn(IV)类似物,[SnCl(4)oC(6)H(4)(CH(2)
EMe)(2)}]和[SnCl(4)(Et(2)Se)(2)]获得类似。这些配合物已进行了光谱和分析的表征,并描述了反式-[SnCl(4)(Et(2)Se)(2)]和一些
硒盐的晶体结构,这些盐是作为副产物从母体第4组配合物中衍生的。中性
硫属醚配合物已被评估为通过LPCVD作为ME(2)/ ME薄膜的单源前体。[TiCl(4)oC(6)H(4)(CH(2)
EMe)(2)