A radiation sensitive resin composition which is capable of forming excellent patterns and is highly sensitive and excellent in dry-etching resistance, as well as a process on the improvement of dry-etching resistance. The radiation sensitive resin composition comprises an alkali-soluble resin, a radiation sensitive material and a compound with phenolic hydroxyl groups which has a value of 30 or more in parameter (P) shown in formula 1 below.[Formula 1] parameter (P) = [(13.0 x number of hydroxyl groups in an additive)/(number of benzene rings in an additive)] + [(14.0 x number of diazo- coupling reaction points in an additive) / (number of benzene rings in an additive)] wherein the number of diazo-coupling reaction points is the number of unsubstituted carbon atoms at o- and p-positions relative to the positions of hydroxyl groups in the benzene ring in the compound.
一种能形成优异图案、灵敏度高且耐干蚀性优异的辐射敏感
树脂组合物,以及一种改善耐干蚀性的工艺。辐射敏感
树脂组合物由碱溶性
树脂、辐射敏感材料和
酚羟基化合物组成,
酚羟基化合物的参数(P)值大于或等于 30,如下式 1 所示。 [式 1] 参数(P)=[(13.0 x 添加剂中的羟基数)/(添加剂中的苯环数)] + [(14.0 x 添加剂中的二羟基数)/(添加剂中的苯环数)]。+ [(14.0 x 添加剂中重氮偶联反应点数)/(添加剂中苯环数)],其中重氮偶联反应点数是相对于化合物中苯环羟基位置的 o 位和 p 位未取代碳原子的数目。