申请人:NISSAN CHEMICAL INDUSTRIES, LTD
公开号:US20150031206A1
公开(公告)日:2015-01-29
A composition for forming a resist underlayer film for lithography, including a polymer having a repeating structural unit of Formula (1):
R
1
is a hydrogen atom or a methyl group and Q
1
is a group of Formula (2) or Formula (3):
(wherein R
2
, R
3
, R
5
, and R
6
are independently a hydrogen atom or a linear or branched hydrocarbon group having a carbon atom number of 1 to 4, R
4
is a hydrogen atom or a methyl group, R
7
is a linear or branched hydrocarbon group having a carbon atom number of 1 to 6, a C
1-4
alkoxy group, a C
1-4
alkylthio group, a halogen atom, a cyano group, or a nitro group, w
1
is an integer of 0 to 3, w
2
is an integer of 0 to 2, and x is an integer of 0 to 3), and v
1
and v
2
are independently 0 or 1; and an organic solvent.
一种用于光刻的阻抗下层膜的组合物,包括具有重复结构单元公式(1)的聚合物:其中R1是氢原子或甲基基团,Q1是公式(2)或公式(3)的基团:(其中R2、R3、R5和R6分别是具有1至4个碳原子的线性或支链烃基或氢原子,R4是氢原子或甲基基团,R7是具有1至6个碳原子的线性或支链烃基、C1-4烷氧基、C1-4烷硫基、卤素原子、氰基或硝基,w1为0至3的整数,w2为0至2的整数,x为0至3的整数),以及有机溶剂。