There is provided a composition for forming anti-reflective coating containing a urea compound substituted by hydroxyalkyl group or alkoxyalkyl group, and preferably a light absorbing compound and/or a light absorbing resin; a method of forming a anti-reflective coating for a semiconductor device by use of the composition; and a process for manufacturing a semiconductor device by use of the composition. The composition according to the present invention exhibits a good light-absorption to a light having a wavelength used for manufacturing a semiconductor device. Therefore, the composition exerts a high protection effect against light reflection, and has a high dry etching rate compared with photoresist layers.
本发明提供了一种用于形成抗反射涂层的组合物,该组合物含有被羟烷基或烷氧基烷基取代的
脲化合物,最好还含有光吸收化合物和/或光吸收
树脂;一种通过使用该组合物形成半导体器件抗反射涂层的方法;以及一种通过使用该组合物制造半导体器件的工艺。根据本发明的组合物对具有用于制造半导体器件的波长的光具有良好的光吸收性。因此,与光刻胶层相比,本发明的组合物具有较高的光反射保护效果和干蚀刻率。