Cleaning composition for mold for molding semiconductor device and method of cleaning mold using the same
申请人:NITTO DENKO CORPORATION
公开号:EP0847843A1
公开(公告)日:1998-06-17
A cleaning composition for a mold for molding a semiconductor device comprising an unvulcanized rubber, a cleaning agent, and water in an amount of from 1 to 30% by weight based on the total amount of the cleaning composition.
The cleaning composition is preferably used as a sheet form comprising the cleaning composition itself, wherein a plurality of straight cuts are formed on the surface of the sheet in a definite direction in parallel at an definite interval for enabling folding of the sheet and at least one cutting cut may be formed on the surface such that the cutting cut crosses perpendicularly to the plural cuts.
The cleaning sheet is very effective to remove soiled material on the inside surfaces of a mold formed by repeatedly molding semiconductor devices using a thermosetting resin composition.
一种用于半导体器件成型模具的清洁组合物,由未硫化橡胶、清洁剂和水组成,清洁剂和水的用量为清洁组合物总量的 1%至 30%(按重量计)。
清洁组合物最好以片状形式使用,包括清洁组合物本身,其中在片状表面上以一定的间隔沿一定的方向平行形成多个直切口,以便能够折叠片状物,并且在表面上可以形成至少一个切口,使切口与多个切口垂直交叉。
该清洁片对于清除使用热固性树脂组合物反复模压半导体器件而形成的模具内表面上的污物非常有效。