N-substituted hexamethyldisilazanes as new substances for the synthesis of functional films in the system Si-Ge-C-N-H
摘要:
N-Organylbis(trimethylsilyl)amines of the general formula RN(SiMe3)(2) (R = Me3Si, Et3Ge) were synthesized by reaction of sodium bis(trimethylsilyl)amide with the corresponding trialkylsilyl(germyl) halide. Their IR, UV, and H-1, C-13, and Si-29 NMR spectra were studied, and saturated vapor pressures and thermal stabilities were determined. The possibility of using the RN(SiMe3)(2) compounds as precursors in chemical vapor deposition of films with specified composition was estimated by thermodynamic modeling.
Et3GeN(SiMe3)2 and Et3SnN(SiMe3)2: New precursors for chemical vapor deposition processes
作者:S. V. Sysoev、L. D. Nikulina、E. N. Ermakova、M. L. Kosinova、V. I. Rakhlin、I. P. Tsyrendorzhieva、A. V. Lis、M. G. Voronkov
DOI:10.1134/s0020168513040171
日期:2013.4
We have synthesized the germanium- and tin-containing organosilicon compounds Et3GeN(SiMe3)(2) and Et3SnN(SiMe3)(2) as new precursors for the preparation of materials by chemical vapor deposition. The compounds were characterized by NMR, IR and UV spectroscopies and thermal analysis. Using vapor pressure measurements, we obtained temperature dependences of their saturated vapor pressure. We assessed their thermal stability and calculated the thermodynamic characteristics of vaporization of the organosilicon compounds.