ligands. Aerosol-assisted chemical vapor deposition onto silicon substrates was performed using all three complexes, yielding 2H-WS2 thin films as characterized by Raman spectroscopy and GI-XRD. Film morphology and elemental composition of the films were determined using SEM, EDS, and XPS. Four-point probe measurements afforded a film resistivity of 8.37 Ωcm for a sample deposited from W(dmdt)3 in toluene
评估了羰基
二甲基二硫烯(dmdt)
钨配合物W(CO) 4 (dmdt)、W(CO) 2 (dmdt) 2和W(dmdt) 3作为用于
化学气相沉积WS 2的潜在单源前体。 TGA-MS、DIP-MS 和热解与 NMR 分析的结果与热分解途径一致,其中通过二
硫醇
配体的逆[3+2]环加成产生末端
硫基
配体而损失
2-丁炔。使用所有三种配合物在
硅基底上进行气溶胶辅助
化学气相沉积,产生通过拉曼光谱和GI-XRD表征的2H-WS 2薄膜。使用
SEM、EDS 和 XPS 测定薄膜的薄膜形态和元素组成。四点探针测量表明,在 600 °C 下由 W(dmdt) 3在
甲苯中沉积的样品的薄膜电阻率为 8.37 Ωcm。