申请人:Adeka Corporation
公开号:EP2175320A1
公开(公告)日:2010-04-14
An alkali developable photosensitive resin composition contains (J) a photopolymerizable unsaturated compound having a structure resulting from the addition reaction of (B) a compound having a β-diketone moiety or a compound having a β-ketoester group to the (meth)acryloyl group of (A) a compound having at least two (meth)acryloyl groups and a hydroxyl group and subsequent esterification of the hydroxyl group of the resulting addition product with (C) a polybasic acid anhydride. The compound having a β-diketone moiety is preferably a novel β-diketone compound represented by general formula (I):
wherein R1 is a C1-C20 alkyl group; R2 represents R11, OR11, COR11, SR11, CONR12R13, or CN; R11, R12, and R13 are each hydrogen, a C1-C20 alkyl group, etc.; a is 0 to 3; and b is 0 to 4.
一种可碱显影的感光树脂组合物含有(J)可光聚合的不饱和化合物,其结构是由(B)具有β-二酮分子的化合物或具有β-酮酯基的化合物与(A)具有至少两个(甲基)丙烯酰基和一个羟基的化合物的(甲基)丙烯酰基发生加成反应,然后将加成产物的羟基与(C)多碱性酸酐酯化而成。具有 β-二酮分子的化合物最好是通式 (I) 所代表的新型 β-二酮化合物:
其中 R1 是 C1-C20 烷基;R2 代表 R11、OR11、COR11、SR11、CONR12R13 或 CN;R11、R12 和 R13 分别是氢、C1-C20 烷基等;a 是 0 至 3;b 是 0 至 4。