[EN] COMPOSITIONS OF LOW-K DIELECTRIC SOLS CONTAINING NONMETALLIC CATALYSTS<br/>[FR] COMPOSITIONS DE SOLS À FAIBLE CONSTANTE DIÉLECTRIQUE CONTENANT DES CATALYSEURS NON MÉTALLIQUES
申请人:SBA MATERIALS INC
公开号:WO2014071090A1
公开(公告)日:2014-05-08
A sol composition for producing a porous low-k dielectric material is provided. The composition can include at least one silicate ester, a polar solvent, water, an acid catalyst for silicate ester hydrolysis, an amphiphilic block copolymer surfactant, and a nonmetallic catalyst that reduces dielectric constant in the produced material. The composition can further include a metallic ion at a lower parts-per-million concentration than the nonmetallic catalyst, and/or the composition can further include a cosolvent. A method of preparing a thin film on a substrate using the sol composition is also provided.