COMPOUND, RESIN, PHOTORESIST COMPOSITION, AND METHOD FOR PRODUCING PHOTORESIST PATTERN
申请人:ICHIKAWA Koji
公开号:US20120295201A1
公开(公告)日:2012-11-22
A compound represented by formula (I):
wherein
T
1
represents a single bond or a C6-C14 aromatic hydrocarbon group,
L
1
represents a C1-C17 divalent saturated hydrocarbon group in which a methylene group may be replaced by an oxygen atom or a carbonyl group,
L
2
and L
3
each independently represent a single bond or a C1-C6 divalent saturated hydrocarbon group in which a methylene group may be replaced by an oxygen atom or a carbonyl group,
ring W
1
and ring W
2
each independently represent a C3-C36 hydrocarbon ring,
R
1
and R
2
each independently represent a hydrogen atom, a hydroxyl group, or C1-C6 alkyl group,
R
3
and R
4
each independently represent a hydroxyl group, or C1-C6 alkyl group,
R
5
represents a hydroxyl group or a methyl group,
m represents 0 or 1, and
t and u each independently represent an integer of 0 to 2.
一个由化学式(I)表示的化合物:其中T1代表一个单键或一个C6-C14芳香烃基,L1代表一个C1-C17二价饱和碳氢基团,其中一个亚甲基基团可以被氧原子或羰基所取代,L2和L3分别独立地代表一个单键或一个C1-C6二价饱和碳氢基团,其中一个亚甲基基团可以被氧原子或羰基所取代,环W1和环W2分别独立地代表一个C3-C36碳氢环,R1和R2分别独立地代表一个氢原子、一个羟基或一个C1-C6烷基基团,R3和R4分别独立地代表一个羟基或一个C1-C6烷基基团,R5代表一个羟基或一个甲基基团,m代表0或1,t和u分别独立地代表0到2之间的整数。