Electron‐impact ionization cross sections of the SiF3 free radical
摘要:
Absolute cross sections for electron-impact ionization of the SiF3 free radical from threshold to 200 eV are presented for formation of the parent SiF+3 ion and the fragment SiF+2, SiF+, and Si+ ions. A 3 keV beam of SiF3 is prepared by near-resonant charge transfer of SiF+3 with 1,3,5-trimethylbenzene. The beam contains only ground electronic state neutral radicals, but with as much as 1.5 eV of vibrational energy. The absolute cross section for formation of the parent ion at 70 eV is 0.67±0.09 Å2. At 70 eV the formation of SiF+2 is the major process, having a cross section 2.51±0.02 times larger than that of the parent ion, while the SiF+ fragment has a cross section 1.47±0.08 times larger than the parent. Threshold measurements show that ion pair dissociation processes make a significant contribution to the formation of positively charged fragment ions.
Unstable intermediates. Part 167. Electron spin resonance studies of trifluorosilyl and related radicals
作者:Martyn C. R. Symons
DOI:10.1039/dt9760001568
日期:——
not obtained from O(SiF3)2 or SiF3(NMe2), but species similar to A containing two strongly coupled 19F nuclei have been detected. These are identified as F2SiOSiF3 and SiF2(NMe2) respeclively. The radical O(SiF3) is obtained in certain samples of SiF4.
An XPS study of XeF2 dry etching of tungsten silicide
作者:E. Grossman、A. Bensaoula、A. Ignatiev
DOI:10.1016/0039-6028(88)90575-4
日期:1988.1
(QCM) measurements have been used to study the etching of WSi0.6 by XeF2. Preferential etching of Si was observed for spontaneous etching and ion beam assisted etching. The Si removal from the WSi matrix created defects which enhanced the spontaneous etch rate by up to 30 times over that of the W(100) etch rate. The surface composition of WSi0.6 changed under XeF2 exposure with the observation of WF
X 射线光电子能谱 (XPS) 和石英晶体微量天平 (QCM) 测量已被用于研究 XeF2 对 WSi0.6 的蚀刻。对于自发蚀刻和离子束辅助蚀刻,观察到 Si 的优先蚀刻。从 WSi 基体中去除 Si 产生的缺陷使自发蚀刻速率比 W(100) 蚀刻速率提高了 30 倍。通过观察 WF、SiF 和 SiF3 以及捕获在反应层中的挥发性反应产物 SiF4,WSi0.6 的表面组成在 XeF2 暴露下发生了变化。
The interaction of WF6 with Si(100); thermal and photon induced reactions
作者:R.B. Jackman、J.S. Foord
DOI:10.1016/0039-6028(88)90596-1
日期:1988.1
Abstract The thermal and UV photon-induced interaction between WF6 and Si(100) has been examined using AES and thermal desorption mass spectrometry. At 77 K WF6 physisorbs on the silicon surface. Above 150 K dissociative chemisorption phases are formed, which decompose in three distinct stages as the temperature is raised in the range 300–900 K to desorb silicon fluoride and produce a Si/W interface
摘要 已使用 AES 和热解吸质谱法检查了 WF6 和 Si(100) 之间的热和紫外光子诱导相互作用。在 77 K WF6 物理吸附在硅表面上。高于 150 K 时会形成解离化学吸附相,随着温度在 300-900 K 范围内升高,其分解为三个不同的阶段,以解吸氟化硅并产生 Si/W 界面。结果表明,WF6 在高于 300 K 的 Si(100) 上迅速形成薄腐蚀膜,随着该层开始增厚,这会产生明显的钝化效果。快速反应需要 Si 相互扩散到该生长膜中并解吸氟化硅;因此,稳态反应速率在 300-400 K 的温度范围内显着增加,这些过程的速率上升到与表面的 WF6 通量相当。SiFx 物种的自发进化被观察为化学吸附的竞争途径,并讨论了这种现象的起源。来自氘灯的低强度紫外光被发现对 WF6 在 Si(100) 上形成的解离态没有影响。相比之下,发现光子照射会导致分子吸收的 WF6 快速解离,导致
Reactions of SiF2 radicals have been studied in a fast-flow system. Rate constants at 295 K of (4.7±0.3)×10−13 cm3 molecule−1 s−1 for the reaction of SiF2 + F2, and (5.1±0.6)×10−13 cm3 molecule−1 s−1 for SiF2 + Cl2 were obtained. No reaction was observed with O2 and H2. SiF2 was detected by laser-induced fluorescence, and lifetime observations and an excitation spectrum are reported.
Hexapole-selected supersonic beams of reactive radicals: CF3, SiF3, SH, CH, and C2H
作者:Michael A. Weibel、Toby D. Hain、Thomas J. Curtiss
DOI:10.1063/1.475711
日期:1998.2.22
A supersonic corona discharge source was used to produce molecular beams of plasma particles. Neutral, polar components of the plasma mixture were selectively focused by an electrostatic hexapole, thereby “simplifying” the chemical and rotational state composition of the beam. Careful choice of a radical precursor, combined with control of discharge and hexapole voltage allowed the production of pure beams of CF3, SiF3, and SH (purity typically better than 90%), with no noticeable signal arising from undissociated precursor, ions, or other radicals. Focused beams from a hydrocarbon plasma contained a radical mixture of predominantly CH and C2H. Radical beams were characterized by rotationally and translationally cold temperatures (typically TR<20 K and TS<20 K, respectively) and high intensities (typically 1011–1012 cm−2 s−1). Simulated focusing spectra using classical trajectory calculations showed generally good agreement with the experimental data, leading to the first experimental measurement of the permanent electric dipole moment of SiF3 (μ=1.2±0.1 D).