Methods and compositions for etch cleaning microelectronic substrates in carbon dioxide
申请人:——
公开号:US20040045588A1
公开(公告)日:2004-03-11
A method of cleaning a microelectronic substrate is carried out by providing a cleaning fluid, the cleaning fluid comprising an adduct of hydrogen fluoride with a Lewis base in a carbon dioxide solvent; and then cleaning the substrate by contacting the substrate to the cleaning fluid for a time sufficient to clean the substrate.
METHODS AND COMPOSITIONS FOR ETCH CLEANING MICROELECTRONIC SUBSTRATES IN CARBON DIOXIDE
申请人:Micell Technologies
公开号:EP1503968A1
公开(公告)日:2005-02-09
US6669785B2
申请人:——
公开号:US6669785B2
公开(公告)日:2003-12-30
[EN] METHODS AND COMPOSITIONS FOR ETCH CLEANING MICROELECTRONIC SUBSTRATES IN CARBON DIOXIDE<br/>[FR] PROCEDES ET COMPOSITIONS DE NETTOYAGE PAR DECAPAGE DE SUBSTRATS MICRO-ELECTRONIQUE DANS DU DIOXYDE DE CARBONE
申请人:MICELL TECHNOLOGIES INC
公开号:WO2003097550A1
公开(公告)日:2003-11-27
A method of cleaning a microelectronic substrate is carried out by providing a cleaning fluid, the cleaning fluid comprising an adduct of hydrogen fluoride with a Lewis base in a carbon dioxide solvent; and then cleaning the substrate by contacting the substrate to the cleaning fluid for a time sufficient to clean the substrate.