ORGANOAMINODISILANE PRECURSORS AND METHODS FOR DEPOSITING FILMS COMPRISING SAME
申请人:AIR PRODUCTS AND CHEMICALS, INC.
公开号:US20130319290A1
公开(公告)日:2013-12-05
Described herein are precursors and methods for forming silicon-containing films. In one aspect, there is a precursor of following Formula I:
wherein R
1
and R
3
are independently selected from linear or branched C
3
to C
10
alkyl group, a linear or branched C
3
to C
10
alkenyl group, a linear or branched C
3
to C
10
alkynyl group, a C
1
to C
6
dialkylamino group, an electron withdrawing and a C
6
to C
10
aryl group; R
2
and R
4
are independently selected from hydrogen, a linear or branched C
3
to C
10
alkyl group, a linear or branched C
3
to C
10
alkenyl group, a linear or branched C
3
to C
10
alkynyl group, a C
1
to C
6
dialkylamino group, an electron withdrawing, and a C
6
to C
10
aryl group; and wherein any one, all, or none of R
1
and R
2
, R
3
and R
4
, R
1
and R
3
, or R
2
and R
4
are linked to form a ring.