Provided are 1) a polymer which is excellent in a reactivity to acid and a heat stability and which is less swollen in developing, 2) a compound shown below which is a raw material for the above polymer and 3) a photoresist composition which contains the above polymer and which is improved in LWR and excellent in a heat resistance.
(wherein n represents an integer of 0 to 2; R
1
represents a hydrogen atom, methyl or the like; R
2
to R
10
each represent independently a hydrogen atom, a linear alkyl group, a branched alkyl group or the like; and A and B each represent independently an oxygen atom or a sulfur atom).
提供了以下内容:1)一种对酸反应性和热稳定性优异、在显影时膨胀较少的聚合物;2)下面所示的一种上述聚合物的原材料化合物;3)一种包含上述聚合物并在LWR方面得到改善且具有优异耐热性的光阻组合物。(其中,n表示0到2之间的整数;R1表示氢原子、甲基或类似物;R2到R10各自独立地表示氢原子、线性烷基、支链烷基或类似物;A和B各自独立地表示氧原子或
硫原子)。