申请人:AIR PRODUCTS AND CHEMICALS, INC.
公开号:EP2535343A2
公开(公告)日:2012-12-19
Described herein are organoaminosilane precursors which can be used to deposit silicon containing films which contain silicon and methods for making these precursors. Also disclosed herein are deposition methods for making silicon-containing films or silicon containing films using the organoaminosilane precursors described herein. Also disclosed herein are the vessels that comprise the organoaminosilane precursors or a composition thereof that can be used, for example, to deliver the precursor to a reactor in order to deposit a silicon-containing film.
本文描述的是可用于沉积含硅薄膜的有机氨基硅烷前驱体和制造这些前驱体的方法。本文还公开了使用本文所述有机氨基硅烷前体制造含硅薄膜或含硅薄膜的沉积方法。本文还公开了包含有机氨基硅烷前驱体或其组合物的容器,例如可用于将前驱体输送到反应器以沉积含硅薄膜。