Microwave plasma generation of arsine from hydrogen and solid arsenic
作者:Thomas R. Omstead、Ananth V. Annapragada、Klavs F. Jensen
DOI:10.1063/1.104182
日期:1990.12.10
gas mixture on the amount of arsine generated is investigated. The arsine production reaches a maximum for an argon‐to‐hydrogen ratio of unity indicating that metastable argon species act as energy transfer intermediates in the overall reaction. The generation of arsine and diarsine from easily handled solid arsenic by this technique makes it attractive as a possible arsenic source for the growth of compound