photodecomposition of Si/sub 2/H/sub 6/ at 147 nm results in the formation of H/sub2/, SiH/sub 4/, Si/sub 3/H/sub8/, Si/sub 4/H/sub 10/, Si/sub 5/H/sub12/, and a solid film of amorphous silicon hydride (a-Si:H). Three primary processes are proposed to account for the results, namely, (a) Si/sub 2/H/sub 6/ + h..nu.. ..-->.. SiH/sub2/ + SiH/sub 3/ + H (phi/sub a/ = 0.61); (b) Si/sub 2/H/sub 6/ + h..nu.. ..-->
Tunneling reactions of H atoms with solid Si 2 H 6 at 10K were investigated. The in situ and real-time reactions H + Si 2 H 6 to form silane and polysilanes were monitored using FT-IR. Quantitative analysis of gaseous products was made by thermal desorption spectrometry. Monosilane and polysilanes were detected as major reaction products. The intermediate product SiH 2 was suggested to play an important
研究了 H 原子与固体 Si 2 H 6 在 10 K 下的隧道反应。使用 FT-IR 监测 H + Si 2 H 6 形成硅烷和聚硅烷的原位和实时反应。通过热解吸光谱法对气态产物进行定量分析。甲硅烷和聚硅烷被检测为主要反应产物。建议中间产物SiH 2 对固体产物的Si-Si网络的生长起重要作用。
Diagnostics of the gas-phase thermal decomposition of Si2H6 using vacuum ultraviolet photoionization
作者:Kenichi Tonokura、Tetsuya Murasaki、Mitsuo Koshi
DOI:10.1016/s0009-2614(00)00165-2
日期:2000.3
Vacuum ultraviolet (VUV) photoionization at 10.2 eV was employed for the detection of gas-phase molecules formed after thermal decomposition of disilane at a total pressure of 30 Torr and in the temperature range of 298–740 K. The SinH2(n+1) (n=3–5) and SinH2n (n=2–5) species resulting from disilane pyrolysis in a flow reactor were directly observed using time-of-flight mass spectrometry. Unlike multiphoton
在10.2 eV的真空紫外(VUV)光电离被用于检测乙硅烷在30 Torr的总压力和298–740 K的温度范围内热分解后形成的气相分子。Si n H 2(n使用飞行时间质谱法直接观察到在流动反应器中乙硅烷热解产生的+1)(n = 3-5)和Si n H 2 n(n = 2-5)物质。与在6.4 eV光子下的多光子电离不同,在10.2 eV的VUV单光子电离没有观察到碎片。