作者:R. D. Thompson、B. Y. Tsaur、K. N. Tu
DOI:10.1063/1.92442
日期:1981.4
Reactions between Si and thin films of rare‐earth metals (Gd, Dy, Ho, Er, plus Y and La) in the temperature range of 275–900 °C have been studied by using x‐ray diffraction and ion backscattering spectrometry. The disilicides of these metals are apparently the first phase to form, forming rapidly within a narrow temperature range (325–400 °C), and are stable up to 900 °C. The growth does not follow
已经使用 X 射线衍射和离子背散射光谱法研究了 Si 与稀土金属(Gd、Dy、Ho、Er、加上 Y 和 La)薄膜在 275-900°C 温度范围内的反应。这些金属的二硅化物显然是第一个形成的相,在狭窄的温度范围 (325–400 °C) 内迅速形成,并在高达 900 °C 时保持稳定。增长不遵循分层增长模式。