The plasmachemically activated reaction between N2 and SiCl4 leads via nitrogen atoms to numerous chlorosilazanes: NSi3Cl9, N2Si4Cl10, NSi4Cl11, N2Si4Cl12, N2Si5Cl14, N3Si6Cl15 (3 isomers), N2Si6Cl16 and some related compounds (NOSi4Cl11, N2O2Si6Cl14, N2OSi5Cl12). GeCl4 shows an similar behaviour. This could be shown by GC/MS-investigations. The structures of N2Si5Cl14, N2Si6Cl16 and N3Si6Cl15 have