higher order perhydridosilane, with the purity and volume necessary for use in extensive studies of the chemical vapor deposition (CVD) of epitaxial silicon (e-Si) thin films. The chemical characteristics, thermodynamic properties, and epitaxial film growth of isotetrasilane are compared with those of other perhydridosilanes. A film-growth mechanism distinct from linear perhydridosilanes H(SiH2)nH, where
[EN] PARTIALLY HYDROGENATED CHLOROSILANES AND METHODS FOR PREPARING SAME BY SELECTIVE HYDROGENATION<br/>[FR] CHLOROSILANES PARTIELLEMENT HYDROGÉNÉS ET LEURS PROCÉDÉS DE PRÉPARATION PAR HYDROGÉNATION SÉLECTIVE
申请人:EVONIK DEGUSSA GMBH
公开号:WO2020001955A1
公开(公告)日:2020-01-02
The present invention relates to a method for preparing partially hydrogenated chlorosilanes by selective hydrogenation with a compound of the formula R2AIH, wherein R is a branched or cyclic hydrocarbon. The present invention further refers to partially hydrogenated chlorosilanes prepared with said method, in particular to partially hydrogenated chlorosilanes represented by the formula Cl3SiSi(SiH3)3, (Cl3Si)2Si(SiH3)2 or HSi(SiH3)2SiCI3.
New pathways towards molecular chlorohydrooligosilanes enable their one-pot synthesis in preparative amounts either by the selective chlorination of the corresponding perhydrosilanes with HCl/AlCl3 or by the partial hydrogenation of perchlorooligosilanes with substoichiometric amounts of iBu2AlH. The unexpected selective formation of Cl3Si-substituted species in the partial hydrogenation reactions
Trihydridosilyl-terminated polysilanes and methods of preparation
申请人:Arkles Barry C.
公开号:US08575381B2
公开(公告)日:2013-11-05
Novel trihydridosilyl-terminated polysilanes and methods for their synthesis, which are applicable to other polysilanes, are provided. The synthetic methods provide for facile preparation of products with minimal handling of pyrophoric intermediates and byproducts. The novel compounds contain at least three silicon-silicon bonds and at least one terminal silicon atom having three hydrogen substituents.
TRIHYDRIDOSILYL-TERMINATED POLYSILANES AND METHODS OF PREPARATION
申请人:ARKLES Barry C.
公开号:US20120071678A1
公开(公告)日:2012-03-22
Novel trihydridosilyl-terminated polysilanes and methods for their synthesis, which are applicable to other polysilanes, are provided. The synthetic methods provide for facile preparation of products with minimal handling of pyrophoric intermediates and byproducts. The novel compounds contain at least three silicon-silicon bonds and at least one terminal silicon atom having three hydrogen substituents.