申请人:Fujitsu Limited
公开号:US20040043197A1
公开(公告)日:2004-03-04
The present invention aims to provide a low dielectric constant insulating material which enables high-speed propagation of signals and is suitable as a material for multilayer circuit wires in an electronic part such as a semiconductor element or the like. The low dielectric constant insulating material of the present invention has an atom having a valency of four or more, and at least two cyclic compounds form a cyclic structure with the atom. Aspects such as that the atom having a valency of four or more is one of a carbon atom, a silicon atom, a nitrogen atom, a phosphor atom and a sulfur atom, that the atom having a valency of four or more is a spiro atom, that the atom having a valency of four or more is in sp3 valency state, and the like are preferable.
本发明旨在提供一种低介电常数绝缘材料,该材料可实现信号的高速传播,并适合用作半导体元件等电子部件中多层电路导线的材料。本发明的低介电常数绝缘材料具有一个价数为四或更多的原子,并且至少有两种环状化合物与该原子形成环状结构。具有四价或四价以上的原子是碳原子、硅原子、氮原子、磷原子和硫原子中的一种,具有四价或四价以上的原子是螺原子,具有四价或四价以上的原子处于sp3价态等方面都是优选的。