Low-temperature heteroepitaxy (330 degrees C-430 degrees C of Si0.5Ge0.5 and Si0.25Ge0.75 on Si(100) using single-source silyl-germanes [SiH3GeH3. HSi(GeH3)(3)] produces monocrystalline structures, smooth and continuous surface morphologies and low defect densities. The metastable compressive strain in these films is dramatically enhanced relative to alternative growth methods. At such low temperatures the material grows seamlessly, conformally, and selectively in the "source/drain" regions of prototypical transistors. These results suggest that films grown via silyl-germanes could have applications in optoelectronics and as stressors for mobility enhancement in Si devices. (C) 2008 Elsevier Ltd. All rights reserved.
Synthesis of Butane-Like SiGe Hydrides: Enabling Precursors for CVD of Ge-Rich Semiconductors
作者:Andrew V. G. Chizmeshya、Cole J. Ritter、Changwu Hu、Jesse B. Tice、John Tolle、Ronald A. Nieman、Ignatius S. T. Tsong、John Kouvetakis
DOI:10.1021/ja060428j
日期:2006.5.1
by varying the global intensity, frequency scale, and admixture coefficients of the individual conformers. The (GeH(3))(2)(SiH(2))(2) (1) species was then utilized to fabricate Si(0.50)Ge(0.50) semiconductor alloys reflecting exactly the Si/Ge content of the precursor. Device quality layers were grown via gas source MBE directly on Si(100) at unprecedented low temperatures 350-450 degrees C and display