Synthesis of Si-Ge nanoscale structures via deposition of single-source (GeH3)4−nSiHn hydrides
作者:Changwu Hu、I. S. T. Tsong、V. D’Costa、J. Menéndez、P. A. Crozier、J. Tolle、J. Kouvetakis
DOI:10.1063/1.2011792
日期:2005.8.22
Growth of nanoscale islands with distinct Si0.33Ge0.67, Si0.25Ge0.75, and Si0.20Ge0.80 compositions and uniform sizes is conducted on Si(100) via dehydrogenation of the single-sourcehydrides (H3Ge)2SiH2, (H3Ge)3SiH, and (H3Ge)4Si, respectively. High-spatial-resolution electron energy loss spectroscopy and Raman spectroscopy indicate homogeneous elemental concentrations within and among islands and
Low-temperature heteroepitaxy (330 degrees C-430 degrees C of Si0.5Ge0.5 and Si0.25Ge0.75 on Si(100) using single-source silyl-germanes [SiH3GeH3. HSi(GeH3)(3)] produces monocrystalline structures, smooth and continuous surface morphologies and low defect densities. The metastable compressive strain in these films is dramatically enhanced relative to alternative growth methods. At such low temperatures the material grows seamlessly, conformally, and selectively in the "source/drain" regions of prototypical transistors. These results suggest that films grown via silyl-germanes could have applications in optoelectronics and as stressors for mobility enhancement in Si devices. (C) 2008 Elsevier Ltd. All rights reserved.
Synthesis and Fundamental Studies of (H<sub>3</sub>Ge)<i><sub>x</sub></i>SiH<sub>4</sub><sub>-</sub><i><sub>x</sub></i> Molecules: Precursors to Semiconductor Hetero- and Nanostructures on Si
作者:Cole J. Ritter、Changwu Hu、Andrew V. G. Chizmeshya、John Tolle、Douglas Klewer、Ignatius S. T. Tsong、John Kouvetakis
DOI:10.1021/ja051411o
日期:2005.7.13
epitaxial layers and coherent islands (quantum dots), with Ge-rich stoichiometries SiGe, SiGe(2), SiGe(3), and SiGe(4) reflecting the Si/Ge content of the corresponding precursor. The layers grow directly on Si(100) at unprecedented lowtemperatures of 300-450 degrees C and display homogeneous compositional and strain profiles, low threading defect densities, and atomically planar surfaces circumventing entirely
Low-temperature pathways to Ge-rich Si1−xGex alloys via single-source hydride chemistry
作者:C.-W. Hu、J. Menéndez、I. S. T. Tsong、J. Tolle、A. V. G. Chizmeshya、Cole Ritter、J. Kouvetakis
DOI:10.1063/1.2117620
日期:2005.10.31
We report rapid low-temperature (300–470°C) growth of Si0.50Ge0.50, Si0.33Ge0.67, Si0.25Ge0.75, and Si0.20Ge0.80 alloys on Si(100) using heavy single-sourcehydride molecular compounds (H3Ge)nSiH4−n (n=1–4). Incorporation of the entire SiGe, SiGe2, SiGe3, and SiGe4 framework of these precursors into the film provides precise control of morphology, composition, and strain. Low-energy electron microscopy