Proton‐coupled 29Si NMR spectroscopy and single‐crystal X‐ray crystallography enabled unequivocal structural assignment. Owing to their unique properties, which are reflected in their nonpyrophoric character on contact with air and their enhanced light absorption above 250 nm, 3 and 4 are valuable precursors for liquid‐phase deposition (LPD) and the processing of thin silicon films. Amorphoussilicon (a‐Si:H) films
本文提出了一种方便的合成方法,以克为单位获得2,2,3,3-四甲硅烷基四硅烷3和2,2,3,3,3,4,4-六甲硅烷基五硅烷4。质子耦合的29 Si NMR光谱和单晶X射线晶体学使得结构明确。由于其独特的性能,反映在与空气接触时的非发火特性和250 nm以上的增强的光吸收性能,使3和4成为液相沉积(LPD)和处理硅薄膜的宝贵前体。从3开始沉积高质量的非晶硅(a-Si:H)膜 并通过电导率测量,椭偏,光学显微镜和拉曼光谱进行表征。