Proton‐coupled 29Si NMR spectroscopy and single‐crystal X‐ray crystallography enabled unequivocal structural assignment. Owing to their unique properties, which are reflected in their nonpyrophoric character on contact with air and their enhanced light absorption above 250 nm, 3 and 4 are valuable precursors for liquid‐phase deposition (LPD) and the processing of thin silicon films. Amorphoussilicon (a‐Si:H) films
本文提出了一种方便的合成方法,以克为单位获得2,2,3,3-四甲硅烷基四硅烷3和2,2,3,3,3,4,4-六甲硅烷基五硅烷4。质子耦合的29 Si NMR光谱和单晶X射线晶体学使得结构明确。由于其独特的性能,反映在与空气接触时的非发火特性和250 nm以上的增强的光吸收性能,使3和4成为液相沉积(LPD)和处理硅薄膜的宝贵前体。从3开始沉积高质量的非晶硅(a-Si:H)膜 并通过电导率测量,椭偏,光学显微镜和拉曼光谱进行表征。
Synthesis and Properties of Branched Hydrogenated Nonasilanes and Decasilanes
absorption compared to neopentasilane and the structurallyrelated octasilane (H3Si)3SiSi(SiH3)3. TG–MS analysis elucidated increased decomposition temperatures and decreased ceramic yields for branched hydrosilanes relative to cyclopentasilane. Otherwise, very similar thermal properties were observed for hydrosilane oligomers with linear and branched structures.
最近发现,n> 6的支化高级氢化硅Si n H 2 n +2是用于硅膜液相沉积的极好的前体。本文我们报告的新颖九-和decasilanes(H的克级合成3 Si)的3的Si硅烷(SiH 2)ñ的Si硅烷(SiH 3)3(2:Ñ = 1,5:Ñ = 2)从(H 3 Si)3 SiLi和Cl(SiPh 2)n通过组合的盐消除/脱苯/加氢方法制得Cl。通过NMR光谱和X射线晶体学进行靶分子的结构阐明。与新戊硅烷和结构上相关的八硅烷(H 3 Si)3 SiSi(SiH 3)3相比,图2和图5是非发火的,并且表现出红移的紫外吸收。TG-MS分析表明,相对于环戊硅烷,支链氢化硅烷的分解温度升高,陶瓷产率降低。否则,对于具有直链和支链结构的氢硅烷低聚物,观察到非常相似的热性能。