Synthesis of Zirconium Guanidinate Complexes and the Formation of Zirconium Carbonitride via Low Pressure CVD
摘要:
Thin films of zirconium carbonitride have been deposited on glass at 600 degrees C from two novel guanidinate precursors: [ZrCp'{eta(2)-((PrN)-Pr-i)(2)CNMe2}(2)Cl] and [ZrCp'(2){eta(2)-((PrN)-Pr-i)(2)CNMe2}Cl] (2) (Cp' = monomethylcyclopentadienyl). Both compounds 1 and 2 were structurally characterized by X-ray crystallography. The films grown via low pressure chemical vapor deposition (LPCVD) from compound 1 were mirror-like with a red-brown sheen whereas those from 2 were gray. Chlorine was present in the films although the levels were no higher than 3 at.%. These two compounds clearly show how the coordination environment around the metal center affects the composition of the film, as films from 1 were nitrogen rich and those from 2 were carbon rich. The films were uniform, adhesive, abrasion resistant, conformal, and hard, being resistant to scratching with steel and brass scalpels.
Synthesis of Zirconium Guanidinate Complexes and the Formation of Zirconium Carbonitride via Low Pressure CVD
摘要:
Thin films of zirconium carbonitride have been deposited on glass at 600 degrees C from two novel guanidinate precursors: [ZrCp'{eta(2)-((PrN)-Pr-i)(2)CNMe2}(2)Cl] and [ZrCp'(2){eta(2)-((PrN)-Pr-i)(2)CNMe2}Cl] (2) (Cp' = monomethylcyclopentadienyl). Both compounds 1 and 2 were structurally characterized by X-ray crystallography. The films grown via low pressure chemical vapor deposition (LPCVD) from compound 1 were mirror-like with a red-brown sheen whereas those from 2 were gray. Chlorine was present in the films although the levels were no higher than 3 at.%. These two compounds clearly show how the coordination environment around the metal center affects the composition of the film, as films from 1 were nitrogen rich and those from 2 were carbon rich. The films were uniform, adhesive, abrasion resistant, conformal, and hard, being resistant to scratching with steel and brass scalpels.