The present invention relates to a chemical deposition raw material including a heterogeneous polynuclear complex in which as ligands, at least a diimine and a carbonyl are coordinated to a first transition metal and a second transition metal as central metals, and the chemical deposition raw material is represented by the following formula. In the formula, the first transition metal (M
1
) and the second transition metal (M
2
) are mutually different. The number of diimines (L) is 1 or more and 2 or less, and to the diimine is coordinated one of a hydrogen atom and an alkyl group with a carbon number of 1 or more and 5 or less as each of substituents R
1
to R
4
. With the present chemical deposition raw material, a composite metal thin film or a composite metal compound thin film containing a plurality of metals can be formed from a single raw material.
本发明涉及一种
化学沉积原料,其中包括一个不均匀的多核配合物,其中至少一个二
亚胺和一个羰基作为
配体,配合到第一过渡
金属和第二过渡
金属作为中心
金属,该
化学沉积原料由以下公式表示。在该公式中,第一过渡
金属(M1)和第二过渡
金属(M2)是互不相同的。二
亚胺(L)的数量为1或多个,2或少个,并且二
亚胺与氢原子和碳数为1至5的烷基之一配位,作为取代基R1到R4的每个。使用本
化学沉积原料,可以从单个原料形成含有多种
金属的复合
金属薄膜或复合
金属化合物薄膜。