Reactivity of ZrCl4 and HfCl4 with silylamines and thermal decomposition of the compounds [MCl4{NH(R)(SiR′3)}] (M=Zr, Hf, R=tBu, R′=Me; R=SiR′3=SiMe3, SiMe2H)
摘要:
The Lewis acid/base adducts [MCl4{NH(R)(SiR3')}] (M = Zr, Hf, R = tBu, R' = Me; R = SiR3' = SiMe3, SiMe2H) were synthesized by the 1:1 reaction of MCl4 with NH(R)(SiR3') in dichloromethane solution at room temperature. The decomposition of [MCl4{NH(R)(SiR3')}] proceeds with the elimination of R-3'SiCl, as shown by thermogravimetric analysis. Pyrolysis of the compounds at 620 degrees C under inert conditions (N-2, vacuum) afforded powders of composition [ClMN] or [Cl2MNH]. Preliminary low pressure chemical vapour deposition experiments show that [MCl4{NH(R)(SiR3')}] deposits thin films of metal nitride contaminated with metal oxide. (C) 2007 Elsevier Ltd. All rights reserved.