[EN] CHEMICAL AMPLIFICATION RESIST COMPOSITION, AND MOLD PREPARATION METHOD AND RESIST FILM USING THE SAME<br/>[FR] COMPOSITION DE RÉSERVE À AMPLIFICATION CHIMIQUE, ET PROCÉDÉ DE PRÉPARATION DE MOULE ET FILM DE RÉSERVE UTILISANT CEUX-CI
申请人:FUJIFILM CORP
公开号:WO2010150917A1
公开(公告)日:2010-12-29
A chemical amplification resist composition that is used for preparation of a mold, and a mold preparation method and a resist film each using the composition are provided.